International Journal For Research In Electronics & Electrical Engineering (ISSN: 2208-2735) 2019-03-07T12:40:05+00:00 Virender Singh Open Journal Systems <p>Green Publication provides high quality research journals with monthly frequency, open access and double blind peer-reviewed. Green Publication providing a platform for the researchers, academicians, professional, practitioners and students to impart and share knowledge in the form of high quality empirical and theoretical research papers, case studies, literature reviews and book reviews.<br><span style="font-size: 1.5em;"><strong> <span style="color: black; text-shadow: #048204 0px 0px 3px;">Current Impact Factor: 2.872</span></strong></span></p> MEMS Retroreflector Fabrication and Packaging 2019-03-07T12:40:05+00:00 Wang Wei Li Jiang Feng Mian <p>Integration of 3-D devices, IC or MEMS, often requires a handle wafer which is removed before final packaging of the devices. This process usually uses lapping, chemical etch or high temperature heating to de-bond the handle wafer. A new technique to release a Pyrex handle wafer using laser ablation is presented. Pulsed energy, from a 248nm excimer laser is delivered transparently through the Pyrex handle wafer. This causes delamination of the bonded silicon structures from the handle wafer. This technique offers fast throughput at chip and wafer levels and protects the fragile and delicate active devices from harsh physical, chemicals and potential thermal stresses. We present a method wherein the handle wafer used in 3-D assembly of a MEMS device was released using laser micromachining. A Pyrex handle wafer rigidly supports anisotropically etched, through-silicon wafer, vertical mirrors during thermo-compression bonding to active MEMS parts. After this first thermo-compression bond, the Pyrex handle wafer was lifted off using laser ablation, leaving clearance for additional bond steps, which includes additional components and a package frame. Multiple Au-Au thermo-compression bonds of vertical surfaces onto a single MEMS chip were performed, to assemble and package 3-D MEMS devices.</p> 2018-03-31T00:00:00+00:00 Copyright (c) 2018 International Journal For Research In Electronics & Electrical Engineering